Blue Jay

Versatile Single Wafer LPCVD
tool for Si-based layers in memory devices

High-throughput deposition with flexibility at its core

Blue Jay is a single-wafer LPCVD system built to deliver high-performance SiGe, doped poly, and EPI layers with excellent thickness control and process stability. Its four-chamber configuration allows for multiple processes on the same platform, with only a change of precursor. Blue Jay is a proven workhorse for fabs seeking speed, flexibility, and low cost of ownership.

Key features

Lower thermal budget than traditional furnaces – ideal for advanced nodes

Excellent uniformity control knobs for tight spec layers

Four-chamber system with modular flexibility; process changes require only gas modification

Long in-situ clean (ISC) and wet clean intervals for high output

Up to 56 WPH for SiGe and 40 WPH for liner Si

Supports doped poly, SiGe, Si EPI, and more

Applications

Memory

From high-speed DRAM to high-density 3D NAND, our systems are trusted in high-volume production by leading memory fabs.

Explore how we’re building trust and efficiency across every touchpoint – from silicon to software

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