Precision manufacturing for the most demanding chip architectures

Pushing the boundaries of semiconductor innovation.

Who we are

Eugenus is a next-generation semiconductor capital equipment company specializing in ALD and CVD solutions for memory, advanced logic, power, and emerging memory applications. Headquartered in Silicon Valley, Eugenus provides high-performance thin film deposition platforms with process flexibility, uptime and the lowest COO.

Eugenus is building a history of development with a startup mindset to deliver faster tool customization, lower CoO, and more responsive service – making it an ideal partner for foundries, memory fabs and emerging chipmakers worldwide. With systems in high-volume production, strong patent portfolio and a dedicated team of engineers, Eugenus is helping shape the future of semiconductor scaling in the AI era.

Vision

To develop breakthrough technologies and unlock the creative genius of the world.

Mission

We achieve customer success by engineering innovative semiconductor solutions.

A legacy of trust. A future built on technology.

A brief look into our journey

A culture of collaboration

Behind our breakthroughs is a team driven by purpose. Across continents and disciplines, our global team brings relentless curiosity and technical excellence to lead that change.

Recognized for innovation & design

Why leading chipmakers choose us

75+ issued patents

Patents in ALD/CVD hardware design, plasma systems, and deposition control

Proprietary technologies

Multi-Plenum Showerhead for precursor isolation (QXP+)
Time-Divisional Multi-Station ALD (Lassen)

Strong partnerships

With global semiconductor leaders for co-optimized tool development and process integration

Technology performance & process capability

Industry-leading film uniformity, step coverage & defect control for logic, DRAM, 3D NAND.

Platform flexibility

Supports a range of materials from advanced metals to numerous dielectrics in one platform

High throughput & reliability

Platforms like QXP+ and Harrier M offer >1.5× throughput vs. conventional systems

Explore how we are prioritizing safety, efficiency and trust – from the cleanroom to the cloud

Let's connect

Focus on corporate sustainability

We build for scale, and for the future.

At Eugenus, sustainability is not an afterthought – it's embedded in our technology and operational DNA. As semiconductor demand grows, so do the energy and material pressures on fabs. We are committed to enabling sustainable scaling by delivering tools that are energy-efficient, modular, and process-optimized. Eugenus supports customers in meeting their net-zero and sustainability commitments – not just through promises, but by helping reduce environmental impact at the tool and process level.

Our sustainability commitment includes:

Low CoO
architecture
reducing chemical and precursor usage, energy load, and tool downtime

Extended uptime
design
longer clean intervals, lower maintenance cycles

Modular
components
built for reuse and reconfiguration

Clean process
innovation
‍enabling selective deposition and reduced byproduct formation

Green manufacturing alignment
‍supporting ESG initiatives of global semiconductor customers

Commitment to quality

Eugenus, Inc. consistently provides value to our customers by meeting their requirements with world-class performance in design, manufacturing and service. We strive for continuous improvements in all business processes, and total customer satisfaction through all products and services offered.

Environmental, Health and Safety Policy

At Eugenus, we are committed to upholding the highest standards of environmental stewardship, employee safety, and operational health. Our tools are designed with sustainability and user safety in mind, incorporating features that reduce hazardous exposure, minimize waste, and improve energy efficiency. We ensure compliance with global EHS regulations and actively promote a culture where safety, well-being, and environmental responsibility are embedded into daily operations – from design and assembly to deployment and service.

Information Security

As a technology partner to the world’s leading semiconductor manufacturers, Eugenus recognizes the critical importance of protecting customer IP, process data, and business systems. We implement robust internal information security controls to safeguard digital infrastructure, ensure secure collaboration with partners, and mitigate operational risks. Our commitment to confidentiality and data integrity underpins every customer relationship – ensuring trust, traceability, and resilience across all engagements.