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Smaller chip sizes, more features, and shorter time-to-market demand a new approach to chipmaking – your customers won’t wait. Eugenus is a new breed of semiconductor equipment manufacturing focused on fast, breakthrough innovation to solve complex semiconductor challenges, and give you a competitive advantage.


With the inventive spirit of Silicon Valley, ALD and CVD commercialization legacy, rapid R&D, and world-class manufacturing, we work with customers and partners to deliver next-generation semiconductor solutions that help drive your business success.


Our culture of innovation starts with a talented, diverse team from leading semiconductor companies and a unique blend of system engineering and industry know-how. We embrace a collaborative approach to explore new ideas, unlock the right customer solutions, and create thriving careers.


Push the limits of your semiconductor innovation. It all starts with the Eugenus edge.


To develop breakthrough technologies and unlock the creative genius of the world

We achieve customer success by engineering innovative semiconductor solutions



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Execute With Excellence

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Take Courageous Risks

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Earn Trust and Give Respect

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Act with Uncompromising Integrity and Accountability

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Empower Customer Partnerships

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Innovate in All Directions

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Let Passion Drive You

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Cultivate Collaboration, Diversity and Inclusion

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Be Agile

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Operate in High Velocity

What’s in Our Name? Everything.

Eugenus builds on the success of our past to create a bold future. Our Silicon Valley legacy began at Genus, which first commercialized atomic layer deposition (ALD), and grew its family of thin film applications for advanced semiconductors. After merging with Aixtron, the customer base grew and reinforced the company’s reputation for advanced semiconductor innovation. In 2017, Eugene Technology saw the potential of its ALD and CVD products and acquired the divisions, creating Eugenus as a wholly-owned subsidiary. With our roots firmly planted in the rich heritage of leading process technology, a strong customer foundation, and world-class Korean manufacturing, we begin our journey forward to transform the industry.





Genus founded
ALD and CVD commercialization

AIXTRON/Genus merger 

Eugene Technology acquires Aixtron CVD and ALD divisions

Eugenus launches


Eugenus, Inc. consistently provides value to our customers by meeting their requirements with world-class performance in design, manufacturing and service.  We strive for continuous improvements in all business processes, and total customer satisfaction through all products and services offered.

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