Key Features

 

  • Multi-stations per process module, combined with station-to-station process isolation, results in film performance equivalent to single wafer tools and enhanced throughput
     

  • High temperature capability >630°C
     

  • Comprehensive, modular chemical delivery system
     

  • Efficient footprint, low cost-of-ownership, and low cost-of-consumables
     

  • Unique multi-plenum showerhead designs to ensure precursor isolation for multi-component film deposition