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July 20, 2020

Eugenus Launches QXP+ Thermal ALD Platform


Eugenus Inc. has unveiled the launch of the QXP+ Advanced Thermal ALD, a new generation of its single-wafer multi-station ALD product that incorporates innovative improvements in the production-proven platform’s throughput and reliability for high-volume manufacturing.


The QXP+ demonstrates enhanced technical capabilities that elevate the productivity and reliability of precision control in the deposition profile, as well as software improvements for better user experience and cost-efficiency. By cutting nonuniformity nearly in half and enabling station-to-station matching, key feature upgrades such as the dual zone heater and external centering to adjust concentricity provide valuable improvements as the QXP+ expands upon existing core technology. While maintaining previous generation process transparency and high-volume shipment of the QXP 8300, the updated platform will also enable future enhancements and continuous improvement for users going forth. Key memory customers will be making the transition to the new ALD model, as Eugenus prepares to expand the QXP+ portfolio of films to be ready for Customer Demo in Q4 2020 and commercial availability early 2021.


“We are happy to announce our consistent growth and long tradition of innovation through our new and improved QXP+.” states Peter Um, Chairman and CEO of Eugenus. “As we proudly put forth significant improvements in productivity with nearly a 10% increase in process of record and a 50% Mechanical TPUT increase, we strive to enable our customers to efficiently meet today’s challenges and future requirements with constantly improving R&D capabilities and results. We hope to always position and prove ourselves as a consistently excelling player in providing next level ALD solutions for our valued customers.”

November 20, 2017

Aixtron completes sale of ALD/CVD memory product line to Eugene Technology


Deposition equipment maker Aixtron SE of Herzogenrath, near Aachen, Germany has completed the sale of its atomic layer deposition (ALD) and chemical vapor deposition (CVD) memory product line – which is based in San Jose, CA, as part of its US subsidiary Aixtron Inc – to Eugene Technology Inc, a US subsidiary of South Korea-based Eugene Technology Co Ltd (which makes single-wafer ALD, CVD and plasma deposition and surface treatment systems).

The sale was announced in late May, but received approval from the Committee on Foreign Investment in the United States (CFIUS) only in late October, after a determination that there were no unresolved US national security concerns.

Aixtron will receive about $60m for the assets being transferred and $11m for open supplier orders for which it retains the liability to pay.

Aixtron Inc of Santa Clara, CA, USA will continue to provide sales and support for its continuing businesses.

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